PF-300T Astra
12 inch PEALD equipment
Product Introduction
PF-300T Astra series is our company's independent research and development of Atomic Layer Deposition equipment, which can be configured with 3 2-station reaction chambers, which has been used in advanced chip manufacturing and advanced packaging (TSV) fields, and is also developed for advanced process front-end process (FEOL). PEALD SiO2, SiN films, etc. are now available.
