Product introduction
NF-300H Astra
12 inch PEALD equipment
Product Introduction
NF-300H Astra series is our company's self-developed （Atomic Layer Deposition）equipment, which can be configured with 3 6-station reaction chambers, and its ALD reactor is equipped on the high-capacity PECVD platform to meet the demand for equipment capacity. PEALD SiO2, SiN films, etc. are now available.
Product features
NF-300H Astra
12 inch PEALD equipment
Product Features
-The step coverage of ALD film can reach 95% at aspect ratio;
- Excellent film properties with good CoO
- It has good uniformity and shape retention
- It can be configured with 1 to 3 PMs, and each PM with 6deposition stations
- High-capacity platform
- Passed S2 safety certification and f47 standard inspection
