PF-300T SAF, PF-200T SA
12 inch , 8 inch SACVD equipment
Product Introduction
SACVD series is a sub-atmospheric pressure chemical vapor deposition (SACVD) equipment independently developed by our company. The SACVD process chamber is mounted on the high-productivity PECVD platform, which has been proven in mass production lines. This SACVD product is mainly used in STI, PMD / ILD, etc. to meet the needs of gap fill in structures with relatively high aspect ratios.
