PF-300T、PF-200T
12 inch, 8 inch PECVD equipment
Product Introduction
PF-300T is a product series independently designed and developed by Company. The equipment can be used for deposition of all related common layer dielectric films, and has been widely used in the production of 28nm and above integrated circuit devices. With further R&D efforts, its capability has extended to advanced film deposition, covering ACHM hard mask with high etch selectivity, low dielectric constant film, ADC I etch barrier layer, and Lok II film with ultra-low dielectric constant. With these broad offerings, PF-300T can meet the customers’requirements for multiple technology nodes.
